Instrument capabilities:

1. Instrument specifications:
1. Accelerating voltages: 2-30 kV
2. Schottky FEG emitter
3. SEI resolution (actual) at 30 kV: 3 nm at 1330 Pa; 10 nm at 2660 Pa
2. Operating modes: SEI; BEI; specimen chamber pressures from high vacuum to 2660 Pa; various specimen chamber gases (air & water vapor standard; Ar, N2 and He also tested; other gases may be possible); XEDS (Be window – no elements below Na); telepresence.
3. Specimen stage:
1. 5-axis motorized
2. Maximum sample size: 100 x 100 mm (XY)
3. Heating (1770 K)
4. Peltier-cooled (248 K to 328 K)

Typical experiments (examples):

• Imaging of insulating/dielectric materials
• Imaging biomaterials and polymers at high water vapor pressures
• In situ materials processing
• XEDS mapping and spectrum imaging
• XEDS detector development