| Species and Operating Voltage MV |
Accelerator |
Source Type |
Typical Ion Species |
Typical Flux at the Specimen cm-2s-1 |
| Low Energy Positive Ions 0.02-0.6 |
650 kV NEC Ion Implanter |
Duoplasmatron, and Danfysik 910 and 911 |
Noble Gases, H, Fe, Ni, Cu, Au |
1 X 1012 |
| High Energy Positive Ions 0.3-5.0 |
2 MV NEC Tandem Accelerator |
Internal Source: Duoplasmatron External
Source: Alphatros, SNICS |
Noble Gases, H, S, Fe, Ni, Cu, Au |
1 X1012 |